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6kw HiPIMS
パルス電源

HIPSTER 6
6kw HiPIMS
パルス電源

Full range test

Tested for a full range of magnetrons and
processes (incl. reactive HiPIMS) at the Royal
Institute of Technology (KTH), Stockholm

Stable and robust

Stable and robust discharge process (constant
voltage and no unwanted oscillations)

Externally triggered

Externally triggered and can also be controlled in
master-slave configuration (multiple power
supplies)

Need a DC driving unit?

The HiPSTER series offer an easy upgrade of an
existing magnetron deposition system to true
HiPIMS. If you already have a DC power supply
capable of delivering ~1000 V and ~6 kW then all
you need is the HiPSTER 6 unit.

If you also need a DC driving unit then please
have a look at the HiPSTER DCPSU:s and contact
us for a package deal.

Reactive HiPIMS process control option can be
implemented upon request. This feature allows:

Stable operation in the transition mode
Wide process window of reactive gas flow
with maintained stoichiometric composition

Output Specifications

Average Power: 6000 W
Peak Voltage: 1000 V
Peak Current: 600 A
Regulation Modes: Voltage, Current, Power, Puls current
Pulse frequency: 1-10 000 Hz
Pulse Duration: 2.5 µs to 1000 µs
Arc control: reaction time < 2 µs

Dimensions

19″ rack (3U)
135 mm (H) x 483 mm (W) x 490mm (D)
Weight: ≈ 10kg

Input Specifications

  • Input Voltage: AC 1 phase + N, 100-240 VAC,
  • 50/60 Hz
  • Input Current at 230 V: 0.3 A
  • DC Charging Input: 1000 V max, positive
  • grounded

Environmental Specifications

  • Operating Temperature: +5ºC to +40ºC
  • Storage Temperature: -25ºC to +55ºC
  • Relative Humidity: max 85% non condensing
  • Air Pressure: 80 kPa to 106 kPa
  • Cooling: Air Cooling
  • Pollution degree: 2 (or better). Cooling air
  • must normally be free of corrosive vapos and conductive particles
  • Norms: CE marked

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