海外真空メーカーの日本総代理店　株式会社テクノポート

DESCRIPTION

The ES 40C1 Electron Source is a scanable electron gun with small spot profile. Due to the high transmission of its Einzel-Lens, the ES 40C delivers a high electron beam current over a wide energy range. The ES 40C1 is designed for a stable and reliable operation in e.g. AES, scanning applications, imaging, EELS and electron pulse or desorption experiments (ESD).

FEATURES

• Fine focus microformed tip cathode
• Scannable electron source with a small spot profile
• Integrated scan and deflection unit
• Correction of incident electron beam angle (provided by ES40-PS power supply)

OPTIONS

• Linear shift
• Customised insertion length
• Source shielding material (µ-metal or copper)

TECHNICAL DATA

Mounting flange     　　    DN 40 CF (rotatable)

Energy range       　　　     0 – 5 keV

Sample current   　　       up to 100 µA

Scan area         　　　　      10 mm × 10 mm

Shield             　　　　       Cu or µ-metal

Cathode type         　　   horiated tungsten

Insertion length       　　    min. 155.7 mm, other on request
OD: 33.5 mm (µ-metal), 35 mm (Cu)

Beam diameter       　　　   dependent on working distance,

(FWHM)            　　　　　      min. 120 µm (for distance 56 mm),

Working distance     　　　    23 mm – 150 mm (typical 75 mm)

Bakeout temperature    　　 up to 250 °C

Working pressure    　　　     < 5×10-6 mbar