EF 40C1 Effusion Cell (Knudsen Cell) is a source designed for delivering highly constant evaporation rates by indirect resistive heating at the material. Custom insertion length 114 – 380 mm (other on request).
HEAT3-PS SAMPLE HEATING POWER SUPPLY
(resistive mode)
Please refer to the product page: 27
Mounting flange DN 40 CF (rotatable)
Heater W wire (tungsten)
Temperature range EF 1200 °C (~250 °C – 1200 °C)
EF 1500 °C (~250 °C – 1500 °C,1600 °C for degas)
Temperature stability ± 0.1 °C
Crucible type PBN, Al2O3, Quartz
(option) (other materials on request)
Crucibles volume 5cc
Evaporated materials all typical materials according to crucible type
Thermocouple type EF 1200 °C – type K
EF 1500 °C – type C
Degassing temp. 1600 °C
Type of shutter manual or pneumatic
Water cooling water flow > 0.5 l/min
(required) temperature: 20 – 30 °C
max pressure: 6 bar
Insertion length min. 114 mm (other on request)
OD: 35 mm
Deposition area dependent on working distance
Working distance 100 – 150 mm
Bakeout temperature up to 250 °C
Working pressure < 10-5 mbar